Accurion RSE

Referenced Spectroscopic Ellipsometry Fast Inspection of Thin Films and Surfaces

Name: Accurion RSE
Brand: Park Systems
Availability: InStoreOnly

The Accurion RSE (Referenced Spectroscopic Ellipsometer) is a high-speed ellipsometry system designed for rapid, large-area thickness mapping of thin films and surfaces. By directly comparing a sample to a reference, RSE enables highly sensitive, differential measurements and combines ellipsometric precision with exceptional acquisition speed. With up to 200 complete spectra recorded per second, the system accurately measures film thicknesses ranging from 0.1 nm to 10 µm. Large sample areas, for example 100 mm × 100 mm, can be investigated within minutes while acquiring tens of thousands of spectra, making RSE particularly suitable for fast inspection and process monitoring.

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Referenced Spectroscopic Ellipsometry in a Nutshell

Technology

Benefits of Referenced Spectroscopic Ellipsometry

Referenced Spectroscopic Ellipsometry (RSE) combines the sensitivity of ellipsometry with the speed of reflectometry. By measuring ellipsometric differences relative to a reference, it delivers superior sensitivity for ultra-thin films.

Technology

What is Ellipsometry?

Ellipsometry determines thin-film thickness and optical properties by analyzing changes in the polarization of reflected light.

Technology

How Does Referenced Spectroscopic Ellipsometry Work?

RSE compares sample and reference, enabling single-shot spectral measurements at up to 200 spectra per second for fast, large-area thickness mapping.

Key Features

Single-shot referenced spectroscopic ellipsometry, measuring ellipsometric differences relative to a reference
Acquisition rate of up to 200 spectra per second for high-speed measurements
Live data processing enabling real-time evaluation of film thickness
Micro-spot size of 25 × 40 µm at an angle of incidence of 60°
Film thickness range from below 1 nm up to 10 µm
Spectral range from 450 to 900 nm