Imaging Spectroscopic Ellipsometer

Referenced Spectroscopic Ellipsometry

The RSE(Referenced Spectroscopic Ellipsometry) is a special type of ellipsometer, which compares the sample to a reference. With doing so, the ellipsometric difference between sample and reference can be measured. Due to the orientation of the reference, none of the optical components needs to be moved or modulated during measurement, and the full high resolution spectrum can be obtained in a single-shot measurement. 200 spectra per second are acquired. The synchronized x-y stage enables acquisition of large field film thickness maps within a few minutes.