Research AFM

Large Sample AFM

We lead the frontier of semiconductor engineering with its Large Sample Atomic Force Microscopes, marking a pivotal shift in semiconductor metrology. As semiconductors catalyze societal and AI advancements, their growing complexity, propelled by shrinking node sizes and 3D devices, surpasses the capabilities of conventional microscopies such as optical and scanning electron microscopy. Large sample AFMs are vital to meet this demand. We provide a wide range of powerful models, catering to diverse semiconductor needs in design, analysis, and quality control while considering various applications and budgets. Park AFM's unique advantage is its extreme accuracy, advanced automation, optimizing operations, and precision in semiconductor analysis. This innovation enables seamless high-resolution, nanoscale surface imaging, sub-angstrom height measurements, expediting defect identification, material characterization, and efficient quality control.