Displays

Imaging Ellipsometry

• Spectroscopic measurements on few micron small regions, using patented ROI (Region Of Interest) concept

• Each ROI (Region Of Interest) corresponds to another layer stack ⇒ Multiple measurements in a single run

• Coupling thicknesses between different models allows uncorrelating the results of multi layer films

• UV wavelength range down to 190nm to characterize display materials

• Multiple results from a single measurement: Thicknesses, optical dispersions, compositions

• Pattented RCE6 mode allows tact times of < 20s