FX40 with monitor

Accurion EP4

Our Latest Generation of Imaging Ellipsometers Combines Ellipsometry and Microscopy

Accurion EP4, our latest imaging ellipsometer, combines ellipsometry and microscopy for precise characterization of thickness and refractive index on micro-structures as small as 1 µm. Unlike conventional ellipsometers, all structures inside the field of view are measured simultaneously. The EP4 provides ellipsometric-contrast live-view, allowing detection of sub-nm features and identification of regions of interest for obtaining values and 3D maps of thickness (0.1 nm - 10 µm) and refractive index. Additional accessories are available to expand measurements under controlled conditions or temperature changes.

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The Microscopic Way of Doing Ellipsometry

Simultaneous Measurement of All Pixels inside the Field of View

Spectroscopic Ellipsometry on Each Pixel

Highest Lateral Ellipsometric Resolution

Allowing to Determine Thickness and Refractive Index on Microstructures as Small as 1 µm.

First Identify, then Measure

Intuitive Selection of Measurement Region by Drawing Regions in Live Ellipsometric View.

Continuous Spectroscopic Imaging Ellipsometry

from UV to NIR

Key Features

  • Modular setup: Easy upgrades between different configurations from BAM, single wave-, multiwave- to full spectroscopic ellipsometer
  • Spectroscopic imaging ellipsometry from 190/250/360 nm to 1000/1700/2700 nm
  • Highest lateral ellipsometric resolution of 1 µm, allowing to determine thickness and refractive index on microstructures as small as 1 µm
  • Ellipsometric enhanced contrast images for a live visualization of the sample
  • First identify, then measure: Intuitive selection of measurement region by drawing region in live view
  • Parallel measurement of multiple regions within the selected field of view
  • Knife-edge illumination for the non-destructive suppression of disturbing backside-reflections
  • Enlarge your measurement possibilities by using additional accessories, e.g. cells, temperature control or liquid handling
  • Quality Control: Also available as OEM version for QC in product lines

The EP4, our latest generation of imaging ellipsometers, combines ellipsometry and microsopy. This enables the characterization of thickness and refractive index with the sensitivity of ellipsometry on micro-structures as small as 1 µm.

The modular EP4 software allows direct control and parallel or offline analysis. The EP4 control operates the instrument. Regions for measurements can be selected in the live view. Multiple samples can be arranged and measured automatically. The DataStudio enables data processing of the recorded data. Histogram analysis and line profiles offer a great insight into the details for your samples. The EP4 Model allows the modeling of the samples. Its intuitive handling concept helps the user to create simple to complex sample structures of thin films. It yields information on thickness and refractive indices of the sample. Further physical parameters, e.g. Bandgap or Volume Fraction of a mixed material layer can be obtained as well.

Applications

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2D-Materials

Imaging spectroscopic ellipsometry characterizes graphene and other 2D materials, analyzing CVD grown, exfoliated, and epitaxially grown flakes with the ep4 ellipsometer.

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Curved Surfaces

Ellipsometry measures thin films and AR coatings on flat and curved surfaces. The ep4 ellipsometer addresses AR coating issues on micro-lens arrays.

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Transparent Substrate

Thin films on transparent substrates are key for flexible displays. Knife edge illumination suppresses reflections, allowing non-destructive examination.

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Surface Engineering

Silanization bonds mineral/inorganic and organic components in paints and adhesives. Imaging ellipsometry examines bond formation in structured arrays without fluorescence markers.

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Air-Water Interface

The air/water interface is crucial in biophysics and industry. Brewster angle microscopy (BAM) visualizes Langmuir-Blodgett monolayers and biological materials, investigating molecules, proteins, drugs, DNA, and nanoparticles.

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Anisotropic Films

Anisotropic micro crystals are promising for electronics. Imaging Mueller Matrix Ellipsometry (IMME) measures refractive indices and optical axis orientation in anisotropic thin-film samples like Black Phosphorous.

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Bio Interfaces

Imaging Ellipsometry (IE) provides high sensitivity for mono- and sub-monolayer thickness. It offers micromaps of ellipsometric angles and a contrast mode for thickness changes. Accessories like cells and QCM-D enhance its biological application capabilities.

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MEMS

Spectroscopic ellipsometry measures MEMS structures as small as 1µm, with 0.1nm film thickness resolution. A single measurement provides thickness, refractive index, composition, and contaminations. ECM mode allows fast quality control and curved surface measurements.

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Photonics

Spectroscopic ellipsometry measures optical fibers and waveguides with 1µm lateral resolution and 0.1nm thickness resolution. It covers 190nm to 1700nm, extendable to 2700nm, providing optical data and fast quality control.

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Displays

Spectroscopic measurements on micron-scale regions use the ROI concept for multiple measurements in one run. The UV range down to 190nm characterizes display materials. A single measurement provides thickness, dispersions, and compositions, with RCE6 mode allowing sub-20-second tact times.

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Battery Materials

Operando Imaging Ellipsometry monitors battery electrode materials during charging and discharging, measuring microscopic maps of Delta and Psi. It provides data from various regions, with post-processing analysis including profiles, sub-region, and histogram analysis.