MEMS

Imaging Ellipsometry

• Spectroscopic ellipsometry on MEMS structures down to 1µm

• Precise film thickness measurement on comb structure with 0.1nm thickness resolution

• Multiple results from a single measurement: Film thickness, refractive index, composition, contaminations

• ECM mode (Ellipsometric Contrast-enhanced Microscopy) for fast quality control

• Measurements on curved surfaces

Typical applications include:

• MEMS sensors

• MEMS mirrors and spring coating

• RF MEMS

• Thin film encapsulation

• Gas analyzers

• Humidity sensors