Park Nanostandard Store
Tip Positioning Checker (TPC-060)
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Option Description
The tip positioning checker, TPC-060 is a reference material with optically visible square patterns to align the tip to the measurement positions from the optical images of the tip.
Manufactured by Kims Reference Corp. (internationally accredited reference materials producer from ILAC-MRA and KOLAS via ISO-17034)
Specifications
- Pitch values: 10 μm, 20 μm, 50 μm, 100 μm, 200 μm, 300 μm
- Step height: 60 nm
- Chip size: 5 mm × 5 mm
- Each pattern size: 1 mm × 1 mm
- Material: Si₃N₄ on Si
- Substrate: Circular coupon (Ф 20 mm)
- Traceability: Not certified
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