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SSRM Characterizer (SSRM-100)
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Option Description
The SSRM Characterizer, SSRM-100 is a nanostructure standard with five doping layers sequentially arranged with an activated doping layer width of 5 ~ 40 nm, which is used for SSRM spatial resolution evaluation.
Manufactured by Kims Reference Corp. (internationally accredited reference materials producer from ILAC-MRA and KOLAS via ISO-17034)
Specifications
- Width of active layer: 5 nm, 10 nm, 20 nm, 30 nm, 40 nm
- Spacing of SiO2: 50 nm
- Pattern size: 4 mm
- Substrate: Circular coupon (Ф 20 mm)
- Traceability: Si lattice constant measured by TEM
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