Wafer Processing
Park AFM wafer systems play a crucial role in precise nanoscale measurement and control for wafer fabrication, ensuring accurate construction of devices
Photomask Repair
Park AFM for photomask repair offers a comprehensive solution that streamlines the entire process from automatic defect review to the repair and subsequent verification of the fixes, significantly enhancing repair efficiency and throughput
Advanced Packaging Optical Profilometry
Park AFM's pioneering integration of White Light Interferometry (WLI) enhances quality assurance and process control across all semiconductor manufacturing stages, including advanced packaging and R&D metrology
Flat Panel Display
For flat panel display manufacturing, including OLED, LCD, and photonics, Park AFM offers a highly accurate and non-destructive measurement method, optimized for large sample analysis exceeding 300 mm