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SCM-100
Park Nanostandard Store
SCM Characterizer (SCM-100)
Quotation
Option Description
The SCM Characterizer, SCM-100 is a standard for verifying the electrical properties at the nanometer level and the operating characteristics of SCM that measure the capacitance of the sample surface.
Manufactured by Kims Reference Corp. (internationally accredited reference materials producer from ILAC-MRA and KOLAS via ISO-17034)
Specifications
  • Doping Type: N type-doped / P-type silicon wafer
  • Pitch: 5 μm
  • Line width: 2 μm
  • Step height: 15 nm
  • Material: Si
  • Substrate: Circular coupon (Ф 20 mm)
  • Traceability: Not certified
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