Park Systems

Products & Solutions

Park Systems delivers advanced nanoscale metrology solutions across research and industrial applications. Research AFMs feature a decoupled scanner architecture and True Non-Contact™ technology for distortion-free, high-resolution imaging, with AI-powered SmartScan for intuitive operation. Industrial AFMs offer fully automated, high-throughput 3D metrology for semiconductor manufacturing, display technology, and quality assurance. Beyond AFMs, Imaging Spectroscopic Ellipsometry (ISE), White Light Interferometry (WLI), AFM-IR spectrometers, and Digital Holographic Microscopy (DHM) extend Park Systems' capabilities across optical, infrared, and phase-imaging modalities. Active Vibration Isolation (AVI) systems ensure measurement stability across all platforms.

Atomic Force Microscopes

Research AFM

Versatile high-resolution AFMs for nanoscale research and analysis

Atomic Force Microscopes

Industrial AFM

Fully Automated in-line AFMs for semiconductor and industrial applications

Ellipsometer

High-resolution optical metrology for thin film microanalysis

Digital Holographic Microscopes

Non-contact 3D optical microscopy for research and industrial applications

Active Vibration Control

Active Vibration Isolation

Vibration Isolation systems for enhanced measurement data quality