Park Systems

Products & Solutions

Park Systems delivers advanced nanoscale metrology solutions across both research and industrial applications. Research AFMs feature a decoupled scanner architecture for distortion-free imaging, while True Non-Contact™ technology preserves tip and sample integrity. The AI-powered SmartScan streamlines operation, providing researchers with intuitive and high-resolution nanoscale measurements. Industrial AFMs are designed for automated, high-throughput environments, offering advanced 3D metrology and fully automated AFM solutions for semiconductor manufacturing, display technology, and quality assurance. In addition to AFMs, Imaging Spectroscopic Ellipsometry (ISE) enables high-resolution optical analysis of microstructured thin films, while White Light Interferometry (WLI) and Nano-Infrared Spectroscopy (NanoIR) further expand Park Systems’ metrology capabilities. Active Vibration Isolation (AVI) systems enhance measurement stability across both research and industrial applications, minimizing external disturbances to ensure the highest level of accuracy.

Atomic Force Microscopes

Research AFM

Atomic Force Microscopes

Industrial AFM

Fully Automated in-line AFMs for semiconductor and industrial applications

Ellipsometer

Imaging Spectroscopic Ellipsometer

Park Systems’s Imaging Spectroscopic Ellipsometry Combines ellipsometry & optical microscopy for precise microanalysis Made in Germany

Active Vibration Control

Active Vibration Isolation

Vibration Isolation systems for enhanced measurement data quality