Name: TSC-050
Brand: Park Systems
Availability: InStoreOnly

Nano Standard Samples

Tip Shape Checker (TSC-050)

The tip shape checker, TSC-050 is a reference material to check the shape of the AFM tip apex. If the certified linewidth (WC) is subtracted from the AFM line profile of a TSC-050, the shape of the tip apex can be determined.

Manufactured by Kims Reference Corp. (internationally accredited reference materials producer from ILAC-MRA and KOLAS via ISO-17034)

Quotation

Specifications

Line width (W_C): 50 nm
Reference pitch (P_R): 250 nm
Trench width: 200 nm
Pattern depth (D): 100 nm (Not certified)
Pattern size: 4 mm × 1.3 mm (Certified area 3 mm)
Substrate: Rectangular coupon (9 × 18 mm)
Traceability: KOLAS (KRISS) traceable via ISO 17034:2016

Applications

Tip shape: If the certified linewidth (W꜀) is subtracted from the AFM line profile of the isolated Si line, the shape of the tip can be directly visualized near the tip apex.
Radius and cone angle: The radius (R) and cone angle (α) of the tip can be determined from the estimated tip shape near the apex.
Scale Calibration: The measurement scale of AFM image can be calibrated from the certified pitch value (Pᵣ).