Park Systems

1982 - 1996

The advent and commercialization of AFM

In 1985, Sang-il Park, the CEO of Park Systems, was a PhD student and integral member of Professor Calvin Quate’s team at Stanford, which invented the atomic force microscopy (AFM) together with the researchers at IBM. In 1988, Dr. Park upon his graduation took this technology out of the lab and founded Park Scientific Instruments (PSI), where it pioneered the commercialization of AFM. After releasing a series of AFM products that were sold into both academia and industry, PSI was acquired by Thermo Spectra in 1997.

1997 - 2007

The next generation AFM and Park Systems

Recognizing the potential of AFM, Dr. Park returned to South Korea and founded Park Systems (prev. PSIA) with a vision to develop the next generation AFM that would solve the shortcomings of conventional systems the monolithic scanning architecture that produced bowed images, and crosstalk phenomena that generated data artifacts and make True Non-Contact AFM a reality.

Furthermore, Park Systems developed the industrial AFM systems and succeeded in selling them to the world’s largest data storage makers. This provided a platform for the subsequent development of automated AFM for the semiconductor market.

2008 - 2015

Market lead and the IPO

Park Systems grew rapidly through the introduction of new AFM series, and expansion of the product lines. It provided the most comprehensive line of AFMs from research desktop to fully automated AFM systems integrated with robotic arms.

Park Systems signed the first and second joint development projects (JDP) with imec, a world-leading R&D and innovation hub in nanoelectronics and digital technologies. These collaborations were aimed to enhance developments toward next-generation in-line AFM metrology solutions. The company signed the first JDP in 2015, through which it officially joined and established itself as a member of imec's Industrial Affiliation Program (IIAP). Through the JDPs, the two organizations developed the new AFM metrology solutions for the wafer semiconductor sector and supplied 200 in-line AFM units to major semiconductor production lines worldwide.

The company received AA ratings from two separate financial agencies on advanced technologies, becoming the first company to be listed on the KOSDAQ in 2015.

2016 - 2023

Accelerated growth

Park Systems has accelerated its growth through expanded geographical coverage by adding new regional headquarters in Germany, UK, France, Singapore, India, China, Taiwan and Mexico, in addition to Korea, Japan and the US.

Moreover, the successful penetration of its AFM systems into semiconductor fabs, and subsequent domination of this market has catapulted Park Systems onto the position of the world’s leading AFM manufacturer. In 2020, Forbes recognized Park Systems as the emerging top 200 companies under $1 Billion in Asia.

In 2022, Park Systems expanded its business portfolio by acquiring Accurion GmbH, a Germany-based company that develops and manufactures imaging spectroscopic ellipsometers (ISE) and active vibration isolations (AVI).

Outlook 2025 and 2030

Long-term growth opportunities

Park Systems remains dedicated to perpetual advancement, consistently refining its product roadmap to align with the evolving industrial landscape. Through strategic acquisitions and equity investments, the company has consistently bolstered the synergy within its product offering. Furthermore, Park Systems is committed to enhancing its capabilities through mergers and acquisitions, with a focus on companies that offer clear potential product and value synergies.

The pursuit of long-term growth opportunities places Park Systems at the forefront of innovation, boasting a comprehensive suite of automated AFMs meticulously tailored to cater to diverse needs. In the dynamic semiconductor and display sector, where precision reigns supreme, Park AFMs play a pivotal role in semiconductor fabrication metrology, device failure analysis, and various industrial applications. The significance of nanometrology in optimizing device fabrication and performance cannot be understated, and Park Systems stands poised to lead in this critical aspect.

The convergence of Park Systems’s advanced nanometrology portfolio with the demands of the semiconductor and display sectors strategically positions the company to harness enduring growth opportunities.

表面分析和研究的原子力显微镜

用于产线计量的原子力显微镜

椭偏仪

主动隔振

高性能和易用性的纳米测量技术解决方案

精确的纳米测量技术推动行业发展。

解锁纳米科学世界。

全方位支持的网关，

通过纳米测量技术

纳米技术卓越合作伙伴。

公司概况

公司简介

Park Systems Corporation

About Park Systems

Events

News

Locations

Career

Investors

The leading innovator of nanoscale microscopy and metrology solutions

The advent and commercialization of AFM

The next generation AFM and Park Systems

Market lead and the IPO

Accelerated growth

Long-term growth opportunities

Key Facts at a Glance

Revenue compounded growth

R&D investment

AFM market share*

Market capitalization

Global network

Recognition

全球网络

63个区域站点，14个直属办事处。

ESG

History

Career

NANOscientific Symposium

NANOscientific Magazine