联系我们 Sign In
Nano Standard Samples
Step Height Reference (SHR-100)
SHR-100 sample consists of multiple pitches (3 μm, 5 μm, 10 μm) and 100 nm height. (Not certified) This sample is designed for XY and Z calibration.

Manufactured by Kims Reference Corp. (internationally accredited reference materials producer from ILAC-MRA and KOLAS via ISO-17034)

Quotation
Specifications
  • Pitch values: 3 / 5 / 10 μm
  • Step height: 100 nm
  • Chip size: 5 mm × 5 mm
  • Each pattern size: 1 mm × 1 mm
  • Material: SiO₂ on Si
  • Substrate: Circular coupon (Ф 20 mm)
  • Traceability: Not certified
Applications
  • Calibration of depth (Z direction)
The measurement scale of step-height in AFM image can be calibrated from the ratio of the reference step-height (Hᵣ) and the measured pitch value (Hₘ).
  • Calibration of scale (XY direction)
The measurement scale of AFM image can be calibrated from the ratio of reference pitch value (Pᵣ) and measured pitch value (Pₘ).
Explore Other Samples
XYZ Scale Calibrator
More Information >
Z Scale Calibrator
More Information >
AFM Tip Characterizer (AFMTC)
More Information >
Tip Shape Checker (TSC-200)
More Information >
Tip Shape Checker (TSC-050)
More Information >
Grating Pattern Calibrator (GPC)
More Information >
SCM Characterizer (SCM-100)
More Information >
EFM Characterizer (EFM-100)
More Information >
SSRM Characterizer (SSRM-100)
More Information >
Tip Positioning Checker (TPC-060)
More Information >
Park Nanostandard Store