Park Sample Store
Tip Positioning Checker (TPC-060)
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Option Description
The tip positioning checker, TPC-060 is a reference material with optically visible square patterns to align the tip to the measurement positions from the optical images of the tip.
Specifications
- Pitch values: 10 μm, 20 μm, 50 μm, 100 μm, 200 μm, 300 μm
- Step height: 60 nm
- Chip size: 5 mm × 5 mm
- Each pattern size: 1 mm × 1 mm
- Material: Si₃N₄ on Si
- Substrate: Circular coupon (Ф 20 mm)
- Traceability: Not certified
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