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SCM-100
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SCM Characterizer (SCM-100)
Quotation
Option Description
The SCM Characterizer, SCM-100 is a standard for verifying the electrical properties at the nanometer level and the operating characteristics of SCM that measure the capacitance of the sample surface.
Specifications
  • Doping Type: N type-doped / P-type silicon wafer
  • Pitch: 5 μm
  • Line width: 2 μm
  • Step height: 15 nm
  • Material: Si
  • Substrate: Circular coupon (Ф 20 mm)
  • Traceability: Not certified
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