Photonics

Imaging Ellipsometry

• Spectroscopic ellipsometry on small optical fibers and waveguides with lateral resolution down to 1µm

• Precise refractive index measurement on waveguides, vertical facets and fiber ends with relative refractive index difference < 0.001

• Precise film thickness measurement with 0.1nm thickness resolution

• Wavelength range 190nm - 1700nm (IR upgrade to 2700nm possible)

• Multiple results from a single measurement: Film thickness, refractive index, composition, contaminations

• ECM mode (Ellipsometric Contrast-enhanced Microscopy) for fast quality control

Typical applications include:

• Photonics and waveguides

• Integrated photonics

• Vertical facets

• Optical fibers