Ideal for Failure Analysis and Sensitive Materials Research

Park NX-Hivac is a high vacuum AFM ideal for precise semiconductor failure analysis and sensitive materials research. Operating in a high vacuum environment, it delivers enhanced accuracy and repeatability, minimizing tip and sample damage. It's the key to a range of applications, including dopant concentration assessment using Scanning Spreading Resistance Microscopy (SSRM). With Park Systems’s intuitive Hivac Manager and automatic vacuum control, Park NX-Hivac streamlines the vacuum process and offers rapid vacuum conditions. Park NX-Hivac offers high-precision research in an oxygen-free vacuum environment.

High-vacuum AFM for Failure Analysis and Atmosphere-sensitive Materials Research

Park NX-Hivac allows failure analysis engineers to improve the sensitivity and repeatability of their AFM measurements in a high vacuum environment. Because high vacuum measurement offers greater accuracy, better repeatability, and less tip and sample damage than ambient or dry N2 conditions, users can measure a wide r range of signal response in various failure analysis applications , such as dopant concentration of Scanning Spreading Resistance Microscopy (SSRM). Park NX-Hivac enables materials scientific research that requires high accuracy and high resolution measurements in a vacuum environment free from oxygen and other agents.

Enhancing SSRM Performance with High-Vacuum Technology

Performing Scanning Spreading Resistance Microscopy (SSRM) measurements under high-vacuum conditions can reduce the required tip-sample interaction force, which can significantly reduce damage to both the sample and the tip. This will extend the life of each tip, making scanning cheaper and more convenient, and can provide more accurate results by improving spatial resolution and signal to noise ratio. This makes high vacuum Scanning Spreading Resistance Microscopy (SSRM) measurements conducted with the NX-Hivac an excellent choice for failure analysis engineers looking to increase their throughput, reduce costs, and improve accuracy.

NX-Hivac Auto Vacuum Control
Park Hivac Manager

High vacuum is controlled by Hivac Manger, pumping for the optimized vacuum condition and venting processes are logically and visually controlled by one-button clicking. Each process is visually monitored by color and schematic changes, you would not need to worry about the sequence of vacuum operation after click on a button. Faster and easier vacuum control software brings you ease of use AFM operation and better productivity.
StepScan Automation with Motorized Stage
Advanced Automation Features

StepScan gives users the ability to program the device to image multiple regions quickly and easily. The NX-Hivac lets you scan a sample in just five steps: Scan, lift cantilever, move motorized stage to user defined coordinate, approach, and repeat. This boosts productivity enormously and reduces required user input to the absolute minimum.
Motorized Laser Alignment
Advanced Automation Features

Park’s motorized laser beam alignment lets the user seamlessly continue automated measurement routines without user input. With our advanced pre-aligned cantilever holder, the laser beam is focused on the cantilever upon tip exchange. The laser spot is then optimized along the X- and Y-axis by motorized positioning knobs.
Low Noise XYZ Position Sensors
Increasing Accuracy and Productivity

The NX-Hivac features Park AFM’s industry leading low noise Z detector that can accurately measure sample topography while the low noise XY closed loop scan minimizes the forward and backward scan gap to less than 0.15% of the scan range.
Closed-loop XY and Z Scanners
Increasing Accuracy and Productivity

With two independent closed-loop XY and Z flexure scanners for the sample and probe tip, you can rest assured that your scans will be extremely accurate. The NX-Hivac offers flat and orthogonal XY scanning with low residual bow, offering out of plane motion less than 1 nm over the entire scan range. The NX-Hivac also features a high speeds Z scanner with a 15 μm scan range and Z scanner non-linearity is less than 0.5%. This provides accurate 2D and 3D measurements with no need for software processing.
24-bit Digital Electronics
Increasing Accuracy and Productivity

Minimize wasted time and maximize accuracy with the trademark NX Series electronics controller featured in the NX-Hivac. Our controller is an all digital, 24-bit high speed device which gives the user the ability to perform a wide range of scans including our True Non-Contact mode. With its low noise design and high speed processing unit, the controller is ideal for precise voltage and current measurement as well as nano scale imaging. The embedded electronics also feature digital signal processing, allowing users to easily analyze measurements and imaging.