AFM System for Ultra-large and Heavy Flat Panel Displays at Nanoscale

원자력 계측에 대한 증가하는 수요를 충족하기 위해, Park NX-TSH 팁 스캔 헤드는 300mm 이상의 샘플에 대한 나노 계측을 능숙하게 처리합니다. 팁 스캔 헤드와 갠트리 스타일의 에어 베어링 스테이지는 정밀한 거칠기, 단계 높이 및 중요한 치수 측정을 가능하게 합니다. 매우 정확하고 비파괴적인 방법으로, Park NX-TSH를 사용한 원자력 현미경은 OLED, LCD, 포토마스크 등에서 신뢰할 수 있고 고해상도의 AFM 이미지를 제공합니다.

The Automated AFM system for Ultra Large and Heavy Flat Panel Displays at Nanoscale

As the demand for Atomic Force Metrology for larger flat panel displays increases, Park NX-Tip Scan Head overcomes nanometrology challenges for samples over 300mm. The Tip Scanning Head and gantry style air-bearing stage allows Park NX-TSH to accurately image roughness measurement, step height measurement, critical dimension measurement. Atomic force microscopy is the most accurate, and non-destructive, method of measuring samples at nanoscale and with Park NX-TSH, reliable, high resolution AFM images can be obtained on OLEDs, LCDs, photomasks and more.

The Fully Automated Tip Scanning Head for OLED, LCD, and 2D Encoder Sample

In the realm of large panel display manufacturing, especially for samples exceeding 300 mm, the need for precise metrology is paramount. This sector faces the challenge of accurately measuring and analyzing nanoscale features on large substrates, a task crucial for ensuring the quality and performance of final products like OLEDs and LCDs. Park Systems responds to this challenge with specialized AFM for large panel scanning.

The Most Reliable Method for Large sample Analysis

As AFM metrology demand for larger flat panel displays increases, Park NX-TSH overcomes nanometrology challenges of large and heavy samples with the Tip Scanning Head and a gantry style air-bearing stage.
Designed for Next-gen Flat Panel Displays

Park Systems has scaled up their AFM tools for Gen8+ and all large flat panel displays using Park NX-TSH (Tip Scanning Head) system, and is the fully automated Tip Scan Head for large sample analysis. It was developed specifically for manufacturers setting up fabs to produce next-generation flat panel displays with the objective to overcome the 300mm size threshold limit.
Changes in the Silicon Wafer Diameter

Using conductive AFM, Park NX-TSH can measure the sample surface with optional probe stations that contact the sample surface and provide current into small devices or chips of wafer level. Park NX-TSH is for a 2D encoder sample with conductive AFM for electric defect analysis by integrating micro probe stations.
Automated Tip Scanning Head System

Park NX-TSH tip scanning head system offers enhanced flexibility and precision for manufacturers involved in producing next-generation flat panel displays. By fixing the sample onto a chuck and employing a gantry-mounted tip scanning head, it effectively overcomes limitations related to sample size and weight. Developed specifically to address the challenges faced by fabs striving to surpass the 300 mm threshold limit, the Park NX-TSH provides a comprehensive solution. With the capability for conductive AFM, it enables precise measurement of sample surfaces, further enhanced by optional probe stations that facilitate current provision into devices on the wafer.
Automatic Measurement Control

The NX-TSH is equipped with automated software that makes operation nearly effortless. Just select the desired measurement program to get precise multi-site analysis with optimized settings for cantilever tuning, scan rate, gain, and set point parameters. Park's user-friendly software interface gives you the flexibility to create customized operation routines so you can access the full power of the NX-TSH and get the measurements you need. Creating new routines is easy. It takes about 10 minutes to make one from scratch, or less than 5 minutes to modify an existing one.