Z スキャナー ヘッド
弊社は、Park AFMの精度を向上させるために、これまでにさまざまなZスキャナーーヘッドを開発してまいりました。
SLD for better cantilever deflection detection
Our heads use Super Luminescence Diode (SLD) to give the most accurate cantilever deflection detection available.
Independent Z-Scan range selection
Because our heads separate the XY scanner from the Z scanner, you have complete control over the Z scan range.
Standard NX AFM Head
The standard NX AFM head is a high speed Z scanner with 15 µm scan range. It is our default head for all of the NX-series AFMs.
Specifications
- Z scan range: 15 µm
- Resonant frequency of Z-scanner: > 9 kHz
- Detection type: Super-Luminescence Diode (830 nm)
- Noise floor: < 0.05 nm (typically 0.03 nm)
Long Travel NX AFM Head
The long travel NX AFM head gives extended Z scan range capability to the NX series of AFMs.
Specifications
- Z scan range: 30 µm
- Resonant frequency of Z-scanner: > 2.0 kHz
- Detection type: Super-Luminescence Diode (830 nm)
- Noise floor: < 0.05 nm (typically 0.03 nm)
SICM NX Head for NX10/NX12
The standard NX SICM head is a high force Z scanner with 15 µm scan range. It is optional head for NX10 and NX12 systems.
Specifications
- Z scan range: 15 µm
Includes a low-noise, high-precision current amplifier
Current noise in buffer: ≤ 650 fA
SICM Long Travel Head for NX10/NX12
The long travel NX SICM head provides extended Z scan range capability to NX10 and NX12 systems.
Specifications
- Z scan range: 30 µm
Includes a low-noise, high-precision current amplifier
Current noise in buffer: ≤ 650 fA
Standard XE Head
Our standard XE head is the ideal for most uses and works with all standard and the advanced modes for XE-series AFMs.
Specifications
- Z scan range: 12 µm
- Resonant frequency of Z-scanner: > 5 kHz
- Detection type: Super Luminescence Diode (830 nm) , standard
- Noise floor: < 0.02 nm (typical), 0.05 nm (maximum)
XE Optical Head
The XE Optical Head lets you use the cantilever of the AFM for light amplification when combined with Raman spectroscopy (Raman is no longer available), enhancing the optical response of the sample. The XE Optical Head provides wide optical accessibility from top, bottom, and side to deliver the best possible beam. This option is compatible with all the options of XE-series AFM.
Specifications
- Optical accessibility: top and side
- Z scan range: 12 µm or 25 µm
- Resonant frequency: 3 kHz (12 µm XE Head), 1.7 kHz (25 µm XE Head)
- Detection type: Super Luminescence Diode (830 nm)
- Noise floor: 0.03 nm (typical), 0.05 nm (maximum)
Long Travel XE AFM Head
Give your XE series AFM an extended scanning range with the 25 µm Z-scanner. This head is perfect for high aspect ratio samples such as optical lenses and MEMS device. The head is fully compatible with all basic and advanced modes and options.
Specifications
- Z scan range: 25 µm
- Resonant frequency: > 1.7 kHz
- Detection type: Super Luminescence Diode (830 nm)
- Noise floor: < 0.05 nm (typically 0.03 nm)