サンプルマウント

サンプルマウントを使うことで、AFM測定のために様々な種類のサンプルを置くことができ、サンプルの固定やアクセスが容易になります。

Multi Sample Chuck

Specifications

  • Sample plate to load multiple small samples for automated sequential scanning
  • Up to 16 samples of less than 10 mm × 10 mm, 20 mm thickness each
  • Sample weight: less than 200 g (in total)

150-mm Vacuum Sample Chuck

Specifications

  • Sample size: 2, 4, 6 inch wafers
  • up to 10 × 10 mm of arbitrary shape, 20 mm thickness
  • Sample weight: less than 500 g

Snap-In Sample Chuck

Specifications

  • Sample chuck to place samples on a repeatable position
  • Positioning repeatability: 5 µm in X and Y direction each

Non-magnetic Sample Holder

Specifications

  • A sample holder to hold samples on top of the XY scanner using clips
  • Recommended for magnetically sensitive samples and / or configuration

Cross-sectional Sample Holder

Specifications

  • Sample holder to vertically mount a cross-sectioned sample
    held by a metallic clip
  • Allowable sample thickness: 3 mm max.

Tilting Sample Chuck

Specifications

  • Sample plate to tilt the sample for sidewall measurements
  • Tilting angle: 10, 15, and 20°
  • Sample size: 20 mm × 20 mm, 2 mm thickness
  • Sample weight: less than 200 g