Multi Sample Chuck Specifications Sample plate to load multiple small samples for automated sequential scanningUp to 16 samples of less than 10 mm × 10 mm, 20 mm thickness eachSample weight: less than 200 g (in total) 150-mm Vacuum Sample Chuck Specifications Sample size: 2, 4, 6 inch wafersup to 10 × 10 mm of arbitrary shape, 20 mm thicknessSample weight: less than 500 g Snap-In Sample Chuck Specifications Sample chuck to place samples on a repeatable positionPositioning repeatability: 5 µm in X and Y direction each Non-magnetic Sample Holder Specifications A sample holder to hold samples on top of the XY scanner using clipsRecommended for magnetically sensitive samples and / or configuration Cross-sectional Sample Holder Specifications Sample holder to vertically mount a cross-sectioned sample held by a metallic clipAllowable sample thickness: 3 mm max. Tilting Sample Chuck Specifications Sample plate to tilt the sample for sidewall measurementsTilting angle: 10, 15, and 20°Sample size: 20 mm × 20 mm, 2 mm thicknessSample weight: less than 200 g