Photonics Imaging Ellipsometry • Spectroscopic ellipsometry on small optical fibers and waveguides with lateral resolution down to 1µm • Precise refractive index measurement on waveguides, vertical facets and fiber ends with relative refractive index difference < 0.001 • Precise film thickness measurement with 0.1nm thickness resolution • Wavelength range 190nm - 1700nm (IR upgrade to 2700nm possible) • Multiple results from a single measurement: Film thickness, refractive index, composition, contaminations • ECM mode (Ellipsometric Contrast-enhanced Microscopy) for fast quality control Typical applications include: • Photonics and waveguides • Integrated photonics • Vertical facets • Optical fibers Brochure × ×
Photonics Imaging Ellipsometry • Spectroscopic ellipsometry on small optical fibers and waveguides with lateral resolution down to 1µm • Precise refractive index measurement on waveguides, vertical facets and fiber ends with relative refractive index difference < 0.001 • Precise film thickness measurement with 0.1nm thickness resolution • Wavelength range 190nm - 1700nm (IR upgrade to 2700nm possible) • Multiple results from a single measurement: Film thickness, refractive index, composition, contaminations • ECM mode (Ellipsometric Contrast-enhanced Microscopy) for fast quality control Typical applications include: • Photonics and waveguides • Integrated photonics • Vertical facets • Optical fibers Brochure × ×
Brochure Literature Refractive Index Measurement of Waveguides by Imaging Ellipsometry (pdf) Refractive Index Measurement of Waveguides and Fibers by Imaging Ellipsometry (pdf) Spectroscopic Imaging Ellipsometry with New High Speed Measurement Mode (pdf) Coupled Topological Interface States (2021) Imaging Ellipsometry Determination of the Refractive Index Contrast and Dispersion of Channel Waveguides Inscribed by fs-Laser Induced Ion-Migration (2018)
