XY扫描仪
Park XY scanners offer a wide range of features that make them extremely accurate and easy to use:
Higher linearity for more accurate scans
Many factors can compromise scanner accuracy like creep, hysteresis, temperature dependence and ageing. That’s why all of our XY scanners are controlled by a closed-loop circuit, which detects the real position of the scanner and corrects the nonlinear behavior, giving an integral linearity of less than 0.5 %
Separate XY and Z scanners with no background curvature to control out-of-plane motion
Park AFMs feature separated XY and Z-scanner structure, with no background curvature to reduce out of plane motion to less than 2 nm per 100 μm of movement.
Better responsiveness so you can see more
Our XY scanners all have independent driving axes for each direction giving better responsiveness than piezoelectric tube scanners so you can see every detail.
10 μm x 10 μm XY Scanner for NX10
For the highest resolution AFM/STM imaging, choose the Park 10 µm XY-scanner. This XY-scanner is only compatible with the NX10.
Specifications
- Scan range: 10 µm
- Resonant frequency: > 850 kHz
- Resolution: 0.01 nm (open-loop)
50 μm x 50 μm XY Scanner for NX10
The standard scanner for NX10, the 50 µm XY-scanner offers high precision scanning and stable imaging condition with no background curvature giving you more accurate data.
Specifications
- Scan range: 50 µm, (5 µm in small mode)
- Resonant frequency: > 850 kHz
- Out-of-plane motion: < 1 nm
- Resolution: 0.6 nm (closed-loop), 0.02 nm (open-loop)
100 μm x 100 μm XY Scanner for NX10
The 100 µm XY-scanner provides a larger, but still extremely precise, measurable area. This makes it perfect for semiconductor and materials research. Its high precision, linearity, and orthogonal scanning performance satisfies even the highest standard of industrial metrology.
Specifications
- Scan range: 100 µm, (10 µm in small mode)
- Resonant frequency: > 450 kHz
- Out-of-plane motion: < 2 nm
- Resolution: 1.5 nm (closed-loop), 0.04 nm (open-loop)
100 μm x 100 μm XY Scanner for NX20, NX12
Our 100 μm XY-scanner provides the wide scan range needed for materials and semiconductor research while still maintaining extremely low out-of-plane motion and high precision movement, linearity, and orthogonality.
Specifications
- Scan range: 100 µm
- Resonant frequency: > 450 kHz
- Out-of-plane motion: < 2 nm
- Resolution: 1.5 nm (closed-loop), 0.04 nm (open-loop)