Park NX20 Lite is a cost-effective yet advanced AFM system, offering top performance for inspecting large samples. This technologically advanced AFM is tailored for the inspection of large samples and boasts a range of innovative features.
The Park NX20 Lite includes many unique capabilities that make it ideal for shared labs that handle a diverse range of samples, researchers doing multi variant experiments, and failure analysis engineers working on wafers. Its reasonable price and robust feature set also make it one of the best value large-sample AFMs in the industry.
Our advanced AFM system features automated imaging capable of processing multiple samples in a single pass, utilizing a specially designed multi-sample chuck that accommodates up to 16 individual samples. The system is equipped with a fully motorized XY sample stage that provides extensive travel capabilities of up to 200 mm x 200 mm, ensuring comprehensive coverage and high efficiency in sample handling.
Our system features two independent, closed-loop XY and Z flexure scanners, ensuring flat and orthogonal XY scans with low residual bow for superior imaging fidelity. Enhanced by the NX electronic controller, the system delivers more accurate height measurements without relying on software processing, optimizing precision across all dimensions.
Equipped with fast Z-servo speeds, our system supports True Non-Contact™ Mode, minimizing tip wear and extending the lifespan of high-quality, high-resolution imaging capabilities.
Featuring a comprehensive set of measurement modes and characterizations, our system offers expanded capabilities through optional accessories and upgrades, and provides advanced electrical measurements essential for detailed failure analysis (FA).
The Park NX20 Lite MultiSample™ scan system offers automated imaging of multiple samples in one pass, featuring a specially designed multi-sample chuck that can load up to 16 individual samples. It includes a fully motorized XY sample stage that travels up to 200 mm x 200 mm, and with its motorized capabilities, the MultiSample Scan™ facilitates programmable multiple region imaging through step-and-scan automation.
Park's Crosstalk Elimination scanner structure removes scanner bow, allowing flat orthogonal XY scanning regardless of scan location, scan rate, and scan size. It shows no background curvature even on flattest samples, such as an optical flat, and with various scan offsets. This provides you with a very accurate height measurement and precision nanometrology for the most challenging problems in research and engineering.
Park AFMs are equipped with the most effective low noise Z detectors in the field, with a noise of 0.02 nm over large bandwidth. This produces highly accurate sample topography and no edge overshoot. Just one of the many ways Park NX series saves you time and gives you better data.
