An Innovative Tool for the Repair of High-end Application Mask Incorporating Advanced AFM
Park NX-Mask presents optimized solutions tailored for inline production, featuring an automated dual pod design specifically engineered for handling masks. Utilizing AFM technology, it ensures seamless repair of any defect type, offering an all-in-one solution encompassing automatic defect review, defect repair, and verification of the repair process. Moreover, its automated dual pod design streamlines the handling of masks in an inline production environment, enhancing efficiency and precision throughout the process.