Park FX300

Park FX300

Premier 300 mm AFM for Research, Quality Control, and Assurance

Park FX300 is engineered to break the boundaries between research and industrial applications, making it a true game-changer in atomic force microscopy. It supports various AFM applications optimized for research, quality control, and reliability assurance. With advanced FX automation capabilities, Park FX300 provides unparalleled user convenience and efficiency. Capable of handling wafer samples up to 300 mm, the system integrates industrial-grade safety features as standard, with an optional Fan-filter unit (FFU) to further enhance sample integrity. These advanced capabilities make Park FX300 an essential solution for semiconductor post-processing, wafer-level packaging, and diverse cutting-edge industrial R&D applications.

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Advanced Capabilities for Industrial & Research AFM Applications

  • 300 mm Wafer Measurement Supporting Advanced Applications

    Fully capable of measuring up to 300 mm wafers, it supports a wide range of advanced AFM applications, including electrical, nanomechanical, thermal and magnetic property measurements.

    300 mm Wafer Measurement Supporting Advanced Applications

  • Lower noise floor and minimal thermal drift

    The improved mechanical structure reduces operational noise floor, thermal drift, and facilitates a more concentrated SLD beam spot, surpassing previous limits. This leads to higher measurement accuracy and high-resolution imaging.

    Lower noise floor and minimal thermal drift

  • Small laser spot size

    • Laser spot size is very small as SLD beam is focused through objective lens
    • 11 µm of SLD beam diameter enables more applicability of fast Imaging cantilevers

    Small laser spot size

  • Faster Z servo performance

    • Driven by a high-force piezoelectric stack and guided by a flexure structure
    • New FX AFM electronic controller provides faster Z servo performance with better accuracy

    Faster Z servo performance

  • Specialized Industrial R&D Applications

    Specialized industrial R&D applications with recipe-based routine measurements.

    Specialized Industrial R&D Applications

  • Integrated Industrial-grade Facility

    Integrated industrial-grade facility featuring a facility controller, a signal tower with an emergency-off unit, and optional contamination control solutions using a fan filter unit.

    Integrated Industrial-grade Facility
FX40 with monitor

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Park Systems Large Sample Series SmartSimulator

Explore Park Systems' AFM technology anytime, anywhere. Experience real scan scenarios and results without hardware or delays. Instant, interactive, and hassle-free — see what’s possible today.

*SmartSimulator is not the actual Park AFM software, but a simplified simulation that offers a minimized experience of Park Systems’ metrology solutions.

*This Simulator is powered by FX200 System; FX300 covers larger size sample scanning up to 300mm.

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Intelligent Automation

It automates essential tasks including probe recognition and exchange, laser alignment, and parameter tuning, thereby boosting efficiency. It features 16 probe slots for repetitive measurements and mode transitions, reducing downtime and improving efficiency.

The Probe Identification Camera reads the QR code imprinted on the chip carrier of a new probe, displaying all pertinent information about each tip, including type, model, application, and usage. This allows for quick selection of the best probe tip for each job, ensuring accuracy and efficiency.

With automated probe exchange, it replaces old probes easily and safely with full automation. Featuring 16 probe slots for repetitive measurements and mode transitions, it reduces downtime and improves efficiency through rapid, autonomous probe switching.

Automatic Beam Alignment positions the laser beam onto the proper location of a cantilever and optimizes the spot’s position on the PSPD both vertically and laterally. It autonomously shifts the X, Y, and Z axes for clearer images with no distortion, all at the click of a button.

Simplified Operation

Automatic sequential measurement

It allows predefined coordinate settings on large samples, such as 300 mm wafers or samples on multi-sample chuck, for automated execution. It supports sequential measurements including topography and advanced modes, and streamlining workflows in research and industrial environments.

Next Generation AFM Controller for High-End Products

Park FX Controller is specifically designed to augment the performance of the Park FX Series. This significant development enables advanced Piezoresponse Force Microscopy (PFM) applications, such as Contact Resonance PFM (CR-PFM) and Dual-Frequency Resonance Tracking (DFRT-PFM), without the need for additional hardware. This ensures our customers can take full advantage of the latest advancements in atomic force microscopy.

controller image
  • DFRT-PFM Without External Amplifiers
  • Enhanced Safety and Real-Time Environmental Monitoring
  • Direct Enablement of CR-PFM with Increased Tip Bias Modulation Bandwidth
  • Faster Ethernet Connectivity for Quick Data and Image Processing
FX40 with monitor

Park nano-IR Spectroscopy

Advanced Nano-IR Spectroscopy for Large Sample Chemical Analysis

Park nano-IR is an integrated infrared (IR) spectroscopy and atomic force microscopy (AFM) system. The spectroscopy part provides chemical identification under 5 nm spatial resolution. It uses a non-contact technique offering the safest spectroscopy scanning and the best in industry spatial resolution. The microscopy part provides nanometer 3D topography with sub-angstrom height accuracy and mechanical property information to the user.

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